Research On The Key Technologies Of Manufacturing SAW Devices Based On Printed Electronics

Surface Acoustic Wave(SAW)Devices are a class of electronic devices which have a wide range of market prospects.They have some outstanding advantages such as high sensitive frequency selectivity,simple structure,a good electronic reliability,and a mass production.The traditional manufacturing method of SAW devices is microlithography,which can be produced with high precision,but at the same time,it has some disadvantages such as complex procedure,high cost,and producing waste gas and liquid.Printed Electronics is a rising technical field of using printing technique to make electronic devices.Using this technology,electronic device manufacturing can be made in a low cost mass production,and even a device can be implemented on flexible substrate.To solve the problem in SAW devices manufacturing,in this dissertation,using Printed Electronics technology to produce SAW Filter is proposed and is verified by experiments.This method will highly simplify the manufacture procedure,reduce the cost,and be environmental friendly.Main contents of this dissertation are as follows:First,the basic principles and current researches of SAW and Printed Electronics technology are studied and reviewed,on the foundation of which,the method that using Printed Electronics on SAW devices production is proposed.Then,to prove the feasibility,a series of experiments are conducted.Considering the practical experiment condition and equipments in the laboratory,and the accuracy that can be achieved,the parameters of SAW Filter are designed.Through simulation,screen printing experiment,and electrical characteristics measurement,the feasibility is verified and character of printed SAW device is studied,which will lay the foundation for future research.In addition,on the basis of the printed SAW filter,a further research on the temperature characteristic is carried out.The center frequency variation tendency with the change of temperature is explored.The result shows that there is an obvious variation tendency of the characteristic of SAW filter over a temperature range,and the feasibility of using the printed SAW device as a temperature sensor is analyzed which can be further studied in the future.