Study On Wireless Generation Of Microwave Microplasma Array Based On Metamaterials

Metamaterials are being widely studied for various practical application such as perfect electromagnetic wave absorbers across the broad electromagnetic spectrum from microwave to optical wavelength,modulators at terahertz frequencies,detectors and imagers,smart antennas.The negative permeability of metamatrials makes it very suitable to serve as an active substrate for the generation of plasma,and it can enhance microwave propagation and generation of high density microplasma.Microplasma has potential applications on surface processing,bio-MEMS sterilization,plasma displays and other fields.Therefore,it is of great significance to generate microplasma on the surface of metamaterials.According to the theories of wireless power transmission and microstrip resonator,a wireless generation of microwave microplasma array at 2.45 GHz based on metamaterials as an absorber at resonance is studied in this thesis.Different structures including a square patch antenna as a transmitter and single split-ring resonator(SSRR)or double split-ring resonator(DSRR)as a receiver,a circluar patch antenna as a transmitter and SSRR or DSRR as a receiver are analyzed.The simulated results show that the S parameters,quality factor and electromagnetic field distribution at the gap of microwave microplasma array are obviously influenced by the space and the center offset between the transmitter and the receiver,the lenght of a side of the resonator and the space between the adjacent array units.The work in the thesis provides some references on wireless generation of larger area or nolinear micrwave microplasma array.