A Research Of High Sensitivity Terahertz Biosensor Based On Metamaterial

In recent years,the development and research of terahertz wave has been paid more and more attention all over the world.With the development of terahertz radiation source and the exploration of terahertz wave characteristics,it has a broad application prospects in biomedical,safety monitoring,Communication and other aspects;Metamaterials is a artificial composite materials,which couldn't be found in nature,its structure is very simple and the design is very flexible.In addition,it is easy to control the spread of electromagnetic waves and so on.Combined with the characteristics of the two,a series of metamaterial terahertz function devices are designed,such as sensors,filters,absorbers and modulators.This paper will focus on the highly sensitive terahertz biosensor based on metamaterials.(1)Before the design of the sensor,we first refer to the related literatures,we learned more about the characteristics of the THz wave and the basic theory of metamaterials,then understand and simulate the various resonant characteristics of the metamaterials,and then investigate the various functional devices based on metamaterials,and study the terahertz material structural design and theoretical analysis.(2)On the basis of the previous research,the transmission type and reflection type metamaterial sensor based on L-type structure were designed.The design of this sensor combines metamaterials with microfluidic technology to form microfluidic channels to test liquid biological samples.Through the electromagnetic simulation software CST 2013,the sensor structure is optimized and designed,and the change of its transmission spectrum is observed and its sensing performance is simulated.(3)Based on the research of L-type sensor,this paper also designed the transmission type and reflection type metamaterial microfluidic sensor based on Split Ring Resonator.This sensor is not sensitive to the electric field polarization direction,we also use CST2013 to research its structure design and sensing performance analysis,through the use of smaller dielectric constant polytetrafluoro Ethylene as the sensor cap and substrate,and through reasonable structural parameters to optimize,the sensitivity of the sensor is improved.(4)After a long period of theoretical exploration and simulation,Through photolithography,coating and stripping process,we were processing the part of the microstructure s,and then the terahertz time domain spectrometer TPS 3000 was used to test the processing structure.At last,we compared the experiment result with the simulation result,and summarized the reasons.