Study On Overall Equipment Effectiveness Of Vacuum Dry Etch Equipment

N Company is an interposer research and production high technology company, major focus on the research and production of advanced assembly and interposer product for government's project and world's semiconductor assembly company. In order to meet the need of large production order and research projects, this article will use OEE tool to statistics and research interposer production line, especially for bottleneck equipment OEE promotion. Overall equipment effectiveness, for short is OEE?OEE is used for express the rate between real capacity and theory capacity, it is a independent measure tool and a simple?useful manage tool. It was widely used in the Euramerican factory and Chinese transnational enterprises.In this article, based on the analysis result of interposer production line condition and process flow, to analysis the OEE condition of each production equipment in the interposer production line, and find out the bottleneck equipment which was affected interposer capability is DRIE Etch equipment. And through the detail analysis of OEE three factors to find out the major problem is non-plan down time was too long, so it's time performance was low. Use the Pareto method for deeply research and confirm the major reason is ETCH equipment's failure, about two-thirds. Use fishbone method to analyze dechuck failure problem, and implement ESC retrofit and chamber wall heating projects. After implement of research findings, the result was show that DRIE etch equipment's OEE was increased from sixty-five percent to seventy-five percent, interposer production capability was increased from one thousand and eight hundred to two thousand and three hundred. It was meet company's need.