The Automatic Control Of Etching System Based On STM32

Photo-assisted electrochemical etching is a very important way for semiconductor manufacturing technology, microelectronics IC manufacturing processes and micro-nano manufacturing process.The principle is the space charge region of the flow control holes to make a vertical hole array structure.In the whole process technology, the light intensity, the etching current, voltage etching, the concentration of the reaction solution, and the temperature will greatly affect the temperature of the etching result.In the etching process, the silicon-based material factors that affected the uniformity of the solution concentration change,the current etching, etching voltage change at any time, and the requirements of the principle of etching current, voltage must be stable, so the need for timely adjustment of the intensity of the light source etching the voltage, to maintain its stability. At the same time, the etching process, the need to record various parameters in real-time etching. This paper develops an automatic etch system, etching system parameters automatic adjustment, real-time recording and other functions.This paper describes the automatic control etch system based on ARM embedded processor STM32, the use of peripheral circuits IT6522 A can control programming power control commands, and the realization of this system applies to the entire silicon etching equipment can improve the micro-channel Preparation of yield and absorption grating plate.Presented in the text of the overall design of the system hardware, and finished with simultaneous access to a number of external data and complete the software programming of data processing. System hardware part by the LCD display, RS232 conversion module,IT6522 A intelligent programmable power, STM32, double AD conversion module, 8G SD card device components. In the hardware of choice, taking into account the characteristics of the practical application of the system, using the control board with a combination of data collection, in which the control board with STM32 core, can USART serial communication,and the AD converter as a whole.The system design features :(1) Automatic etching.(2) automatic data collection, recording.(3) etching parameters fast feedback to adjust.This paper describes an embedded automatic control system has high practical value and significance of the auxiliary application research laboratory equipment.