Study On Displacement Sensing Mechanism Based On Micro-Plane Array Element

Since the current China's manufacturing field is in a stage of transformation and upgrading,so intelligence and automation is a major trend in the development of the manufacturing field.As a result,the closed-loop control system requirements will be increasingly high.As one of the key components of the closed-loop control system,the displacement sensor performance has much influence on the whole control system.The electromagnetic displacement sensors are often used as the position feedback element of some control system working in the complex environment system,because these sensors own strong anti-interference and high reliability.In order to obtain displacement,the electromagnetic displacement sensors disturbance excitation field to produce electrical induction.So the excitation field has great influence on the measurement accuracy of the sensor.In general,the software and hardware compensation means are used for the purpose of reducing the measurement error of the sensor,such as opening chute,sine winding method,error correction model and so on.However,it is difficult to further improve the measurement accuracy of the sensor,because the manufacturing cost restricts and the source of the excitation signal has a large measurement error introduced.Research on a new displacement sensing mechanism and a new time grating displacement sensors based on micro-plane array element was carried out.The work and achievements presented in this paper are summarized as follows:1 Intensive research on the magnetic field needed in the measurement by analyzed the sensing mechanism of the current typical electromagnetic displacement sensors of inductosyn and electromagnetic time grating.So the fundamental pulsating magnetic field is required for the measurement of magnetic field distribution.Research on the magnetic field distribution based on micro-plane array element fundamental construct infinitely to close the fundamental pulsating magnetic field.Then a displacement sensing mechanism based on micro-plane array elements and sensing mechanism of the current electromagnetic time grating is presented with research on the magnetic field distribution of micro-plane array element which is made of multi-turn square coils.2 According to the new displacement sensing mechanism,a new time grating displacement sensor is designed based on the new micro-plane array element,and simulation analysis is carried out.It is indicated that the original error signal of time gatingis reduced from the excitation source by the displacement sensing mechanism proposed,so the structure is feasible.3 Sensor prototype tested experiment is established,and experimental results indicate that the displacement sensing mechanism and the new time grating displacement sensors is feasible.within the range 0mm ~ 130 mm,the original error of the new time grating displacement sensor is reduced by 55%.With the error correction the accuracy of angular displacement measurement is better than±3.6um.4 In order to meet the requirements of the micro-plane array element,using the PCB(Printed Circuit Board)technology.With a multi-layer structure designed,not only the size and weight of the sensor was reduced,but also as compared with traditional processing methods,a higher level of accuracy and consistency is obtained,and it is reduced error much on a pole.The PCB technology has many advantages,such as low cost,suitability for mass manufacture,etc.,so the PCB technology is helpful to improve production efficiency much.At the same time,it is a great promotion for the development of the time gating industrialization in the future.