A Study Of New Materials For The Grating

The grating is acted as an important optical element,especially,as a high-density measuring instrument,The circle measuring grating is an important foundation element for modern optoelectronic precision angle measuring instruments and measuring angle technology.So,based on the photosensitive sol-gel method with mask method in the experiment,this subject mainly studys several granting materials and its corresponding micro-fabrication technology was studied for the circle measuring grating,which intended to provide a new idea and a new method for the study of the new grating materials.Firstly,Lanthanum Nickel,yttrium barium copper oxide was acted as the grating materials.Because BzAcH could chelate metal ions(nickel and yttrium,copper atoms)in sol,the good UV photosensitive gel film was obtained.By using the film photosensitivity,the fine graphics of two metal oxides materials were obtained.Then the circle grating materials(the line width of 40?m,the LNO grating groove depth of 200nm and the YBCO grating groove depth of 300nm)were prepared through the fine patterning processing.Both of the two materials had some shading capabilities in the UV-visible spectral(200nm-800nm),and the YBCO grating had a stronger shading capabilities and could be suitable to UV-visible light.Secondly,a new method to prepare the selectivity dye granting was also studied.That's to say,ZrO2/BzAcH gel film was exposured in UV-visible with the mask,and SiO2/methyl red film was prepared on ZrO2/BzAcH gel film.After washing,the exposed portion was reserved and unexposed portion was dissolved,so the selectivity dye granting was obtained.Meanwhile,the experiment studied a method to prepare the SiO2 subject-based dye and a photosensitive ZrO2 gel film.By using the selectivity dye method,the grating(the width of 100?m,the groove depth of approximately 200nm),the array(the diameter of 50?m,the groove depth of about 280nm)and the circular grating(the width of 40?m)were prepared on quartz substrates.