Measurement Of Out Of Plane Motion For MEMS Based On Phase-shift Interferometry

MEMS 3D dynamic characteristic test to characterize the MEMS devices characteristics under the high speed motion state, are crucial steps in the MEMS of product development process. But because of small size of MEMS devices, usually in the mm, limited the scope of measurement tools. Based on this dissertation on the phase shift method, the microscopic interference fringe phase and solution package technology system research, design a kind of non-contact based on phase-shift interferometry nondestructive measurement system, on the MEMS inside the motion measurement and 3D display.Paper in-depth study of the microstructure and phase shift interference technique, to step three, four, Hariharan and Stoilov dependency algorithm carries on the analysis comparison. Considering the uncertainty and random error factors such as light intensity, finally chooses the best Hariharan algorithm step of ?/2.To reduce caused by MEMS high speed movement of taking pictures of the fuzzy phenomenon of ghosting, stroboscopic imaging using acousto-optic modulator(AOM) control of the laser beam into the time. The opening and closing of the acousto-optic modulator time of 1 us, greatly improve the measurement precision of the system and reduce the error. Studied a variety of good anti-noise performance of unwrapped algorithms,combined the flood fill algorithm with the line segmentation algorithm and the quality oriented graph algorithm, improve the continuity of the unwrapped technique. Introduced temporal unwrapping principle, the selected point due to the phase offset caused by movement of the error compensation, and reduce the system error. MEMS dynamic testing system will be based on the MFC platform software combined with Matlab three-dimensional display technology, to configure parameter measurement system, by MCU and FPGA newsletters, FPGA control AOM, at the same time step type piezoelectric ceramic PZT and Camera, so as to realize precise synchronization control.By analysis of the experimental results of phase shift interference algorithm and phase unwrapped algorithms,and based on CMEMS Si504 oscillator in experimental research under different incentives and temperature test, verify the feasibility of the MEMS from surface testing system, effectiveness and reliability.