Fabrication And Properties Of The Plasma Nano-laser

Conventional semiconductor laser was affected by the optical diffraction limit, resulting in the device feature size has reached its limitation. However, the nano-laser based on the plasma could compress the size of the cavity to deep sub-wavelength scale. This laser has great practical value in biological detection, data storage, medical equipment, military applications and other areas, and become the focus of domestic and foreign research.This paper mainly consists of the following sections:This paper briefly introduced the research background and significance of the nano-plasma laser. And then we elaborated the current domestic and foreign situation from nano-laser and nano-plasma laser these two aspects, which showed the problem to be solved of the current laser research. After that, the paper described the basic principles and the light emitting mechanism of the nano-plasma laser based on the metal film/dielectric film/nanowire structures, then the simulation results were given. The paper also proposed a method to enhance the performance of the laser emission by adding the microlens arrays designed according to the principle of geometrical optics.And then the preparation technology of zinc oxide nanowire arrays were introduced in detail in this paper, And the topography of nanowires were observe and characterize by scanning electron microscope. Then we explored three different coating method to make the nanowire resonator based on the surface plasmon, the microlens arrays were designed and fabricated to decrease the large beam divergence angle of the laser. After that, we packaged the laser as a complete integrated device by engineering process.Finally, the performance of the packaged laser is tested through the optical and electrically pumping, we got the photoluminescence spectra of the nano-laser and the nano-plasma laser, the contrast analysis was also given. Then the current-power curve and the polarization characteristics of the electrically pumped laser were tested. Then the good p-n junction of the ZnO nanowires was confirmed by the SEM-EBIC system. The paper also compared the power of the between the laser with and without microlens arrays, the result confirmed the validity of the improvement method of the laser performance. The last part summarized the contribution of this paper, combining the international developing trend and our disadvantages, the paper pointed out our future work of the nano-plasma laser.