Thin Film Encapsulation With Al₂O₃/alucone Hybrid Multi Layers

In this paper, we used atomic layer deposition(ALD)/molecular layer deposition(MLD) to prepare thin film encapsulation(TFE) with inorganic(Al2O3)/organic(alucone). The TFE was used for encapsulating top-emitting organic light emitting devices(TEOLED). Due to the special nature of TEOLED, the TFE should ensure barrier performance, and have high optical transmittance. We researched the growth conditions of inorganic thin films, and the barrier performance was improved by temperature and precursor. The WVTR of Al2O3/alucone hybrid multi layers have reached 8.68×10-5 g/(m2·day), and the TEF not only maintained their high moisture barrier strength but also showed excellent optical performance of TEOLED.