Design And Performance Research Of Optical Microring Resonators Based On SOI

With the miniaturization and integration trend of the integrated circuit andoptical devices, and the realistic requirement of building large-scalephotoelectric integrated system, the microring resonator based on SOI (SiliconOn Insulator) becomes a hot research topic due to its advantages of highintegration and is compatible with the CMOS processing technology. It shows agreat application potential in areas of high sensitivity sensors, all opticalnetworks, optical gyroscopes, optical switches and so on.After investigating the research status of microring resonators at home andabroad, this thesis designs, fabricates and tests multiple microring resonatorsbased on SOI by means of combining theoretical derivation and simulationvalidation. The aim is to improve the Q value of the resonator through structureoptimization of resonators.First of all, this thesis studies the theory of microring resonators based onthe whispering gallery mode （WGM）. It derives the formulas of varioussingle-microring and dual-microring resonators and analyses their transmissioncharacteristics using the coupled-mode theory and the light interference theory.The relationship between the resonance splitting and the circumference ratio of the two rings is discussed in the series-coupled two microrings one buswaveguide configuration (2R1B), the conditions for thecoupled-resonator-induced transparency (CRIT) effect is also specified in theparallel-coupled two microrings two bus waveguides configuration (2R2B).Then, this thesis builds multiple simulation models of microring resonatorsbased on the finite-difference time-domain (FDTD) method, and simulates andoptimizes the geometrical parameters of the one microring coupled two buswaveguides configuration (1R2B) and the parallel-coupled two microrings twobus waveguides configuration (2R2B). Furthermore, their biological sensingperformances are analyzed, respectively. The simulation results show that thebiological sensing sensitivity of the2R2B structure based on the CRIT effectreaches223.3nm/RIU, which is about three times that of the single microringstructure.Finally, this thesis summarizes the geometrical parameters of the microringresonators that have been simulated. Combining with the micromachiningprocess, the layout is designed and fabricated, and the structures are tested,which lays a foundation for the following experiment studies.