Study On Fabrication Of Fiber-optic Sensor Based On Film By MEMS Technology And Its Application

The concept of Micro Electro Mechanical System (MEMS) began in the 1980s, it generally refers to the device or system consisted of electronic and mechanical components whose critical dimension is from submicron to submillimeter. Compared with traditional mechanical systems, MEMS narrows the size a lot and has undergone great changes in the principle of motion, material processing, measuring, c ontrolling and other aspects. MEMS is a multidisciplinary intersection and strategic frontier of new and high technology, it has greatly improved the miniaturization, intelligent, multi-functional and reliability level of the information system which has a very broad application prospects in the automotive, home appliances and electronics industry and military fields.We make a further research on MEMS device, and the silicon silica corrugated diaphragms have been fabricated by the means of micromachining. Compared with the ordinary flat diaphragm, the corrugated diaphragms have the advantages of smooth, small initial stress, high stability, high young modulus and so on, because of the special role of the corrugated structure. In view of the aforementioned advantages, we use the corrugated diaphragms as the sensor diaphragm of the pressure and vibration sensors, and have fabricated a new type of optical-fiber sensor based on thick diaphragm.In the first chapter, we firstly introduce the research status, basic characteristics and technical classification of MEMS technology, and discuss the development trend of MEMS technology. Then, we put forward the main research content and purposes of this paper.In the second chapter, we systematically introduce the theory and the practical application of several MEMS processing technology.In the third chapter, firstly, according to the experiment process parameters and the improvement of the process parameters that we explored, we fabricate silicon silica corrugated diaphragms successfully through a large number of control experiments. Then the silicon at the bottom of the silicon silica corrugated diaphragm is completely released by the means of the rapid deep silicon etching technique, and the sensor diaphragm is fabricated successfully.In the fourth chapter, firstly, based on the silicon silica corrugated diaphragm we design a micro-vibration fiber-optic test system and test the sensitivity of the core sensing diaphragm. Then using the corrugated diaphragms, we have fabricated a new type of optical-fiber sensor of the gas concentration based on thick diaphragm.In the fifth chapter, we summarize the experimental results in this paper. And make some suggestions on the further research works in the future.