Research On Design Of Digital Lithography Projection Lens And Improve Of Micro-machining Texturing Q-switch

With the popularization of high-definition mobile phone、super-computer and multi-function television,the high accuracy lithography become more and more important in Printed circuit board、Thin film transistor liquid crystal display and Indium tin oxide glass, and that make the research and design mask-less digital lithography system become much more important. In addition, with the prosperous of Food packaging industy、High-grade household appliances industry and High-grade auto industry, the quantity demanded of good performance cold rolled sheet become more and more huge, and it is become urgently needs to solve the problem that research and improve the texturing system for the purpose of more excellent cold rolled sheet. This article contents of two aspects in accordance with my tutor’s Nation science foundation project and Cooperation project with enterprise:in the first half part, we give the optical fundamental theory, analyses some questions in the mask-less lithography system based on DMD, design a high resolution digital lithography system; in the later part, we analyses the defects and deficiencies of acousto-optic q-switched laser texturing system, and we propose a new kind of machinery q-switch with the help of double gain medium systems’stability theory.For the demand of 3μm lithography line width used in high accuracy printed circuit board and display, we design a 2 μm resolution digital lithography projection lens with the help of 0.7XGA DMD as a space light modulator. With the help of optical design software ZEMAX, we simulation-design and optimize the system, the result show that this system effectively reduce the DMD grid effect for the digital space mask and meet all kinds of requirement for projection lens optical system. Beginning from the classics lens structure, we present a new asymmetric structure digital lithography projection lens system with few lens but has more accurate resolution and bigger numerical aperture. Cooperating with different king of DMD, this system can meet all kinds of requirement in high accuracy digital lithography system which line width greater then 2μm, and it offer a new way to transfer space image efficiently.For the enterprise’s demand of high efficiency、high uniformity、high roughness and high randomness in solid state YAG laser texturing, we present a new pulse laser texturing system with beam shaping and a light chopper. Because of the acousto-optic q-switches’self-characteristic, it cannot competent in the high gain laser cavity; laser pulse in a low energy state; short pulse width lead to a high pulse peak; all those make the acousto-optic q-switch laser texturing system cannot used in high efficiency and high roughness cold rolled sheets’production. Just under such situation, we present a new q-switch:firstly, we add a pair of lens to shape the beam in the middle of the cavity, and after that we put a light chopper in the centre of the lens. This new machinery q-switch can work in the high gain laser cavity; increase the laser pulse energy; broaden the pulse width, decrease the pulse peak; all those make the new machinery q-switch laser texturing system in high efficiency and can be produce higher roughness cold rolled sheet.