Finite Element Analysis Of Micro-cantilever Mass Sensor Measuring Principle

Micro-cantilever is one of the most typical structures in MEMS device,it is often used asMEMS sensors and actuators. With high sensitivity, small size and low cost advantages, it hasattracted more and more attention in the field of quality testing.In this paper, we study the micro-cantilever sensors, according to that the adhesivematerial will change the natural frequency of the micro-cantilever, we write the Inverseproblems algorithmby using the established finite element model to get the adhesivematerial’s quality and position, and thus the adhesion material can be analysis better. Themain contents and conclusions are listed in the following.1)According to the established the analytical model and the finite element model of themicro-cantilever,we can use the finite element to solve the natural frequency of the micro-cantilever;By comparing the finite element solution with the analytical results andexperimental results,we verify the feasibility of the finite element method;2)This paper gives the definition of the quality and location of the adhesive material onthe micro-cantilever reverse problem, writes the reverse problem algorithmis according to thesensitivity of the results obtained and the mathematical model;3)This paper gives the comparative analysis of algorithm results, verifies that thealgorithm to solve the adhesion material location and quality is correct, and finds thatsensitivity to different regions is different.In summary, research content and research methods in this paper may have somesignificance for future theoretical research and engineering.