Research On Silicon - Based Integrated Multi - Channel High Performance Arrayed Waveguide Grating

As a new demodulation method of fiber Bragg grating (FBG) demodulation method, arrayed waveguide grating (AWG) demodulation method have high sensitivity and responsibility over traditional FBG sensor. As an important part of AWG demodulation system, the performance of AWG can directly determine the size and efficiency of AWG demodulation system. But the traditional AWG have the disadvantages of large size and high cost. Features of traditional AWG make it hard to satisfy the requirements of high integrated FBG demodulation system. So high-performance multi-channels AWG for the AWG demodulation integration microsystem is urgently required. The intergrated level and demodulation effect of the AWG demodulation integration microsystem will be highly improved.Ultra-small SOI-based 1×16 and 1×32 AWG which have low-insertionloss and low-crosstalk is researched in this thesis. On the basis of analysising the structure of the AWG, through design and simulation of the AWG of which patameters are diffraction order, pitch of adjacent waveguides, slab waveguide focal length, free spectral range and so on.4 kind of 1×16 AWG and 4 kind of 1×32 AWG are analized and designed using Beam Propagation Method (BPM). Simulation results show that both the tradition-shaped and saddle-shaped 1×16 AWG which has 40 arrayed waveguides exhibits good transmission spectrum, the insert loss of the AWG is only-5.3 dB, and the crosstalk is only-22.4 dB. In the 1×32 AWG, the sadle-shaped AWG which has 40 arrayed waveguides has a better transmission spectrum. The insert loss of the saddle AWG is only-7.9 dB, and the crosstalk is only-20.9 dB. In this thesis. SOITECH SOI material with Si thichkness of 0.22 μm and SiO2 thickness of 2 μm is used to manufacture the AWG. The AWGs are fabricated with the help of Singapore Institute of Microelectronics (IME). Experimental results indicates that saddle-shaped 1×16 AWG which has 40 arrayed waveguides exhibits good transmission spectrum, the insert loss of the AWG is only-4.5 dB, and the crosstalk is only-24.3 dB, the ununiformity of loss is 2 dB. Central 26 channels of sadle-shaped 1×32 AWG with 40 arrayed waveguides shows good transmission spectrum, the insert loss and crosstalk are only-7.1 dB and-22 dB.