Application Of The SEM-EDS Technology In The Field Of Surface Component Analysis

Scanning Electron Microscope(SEM) and Energy-dispersive X-ray Spectroscopy(EDS) are two analysis equipments which are common in the field of material analysis. Basically they are used together. And they are powerful. By them we can not only observe surface profile of samples, but also do some microchemical analysis. Because characteristic X-ray mainly shoots from the micron scale, when SEM-EDS technology is used for component analysis, it belongs to body analysis. The accelerating voltage of SEM is about 20 k V. Therefore, at present very few people study SEM-EDS technology with low accelerating voltage. This paper tries to use low accelerating voltage on the material analysis. Hope to get characteristic X-ray of surface to analysis. Explore the application of the surface to composition analysis with SEM and EDS. The main contents of the research are using SEM-EDS technology to analyze the composition of nano film materials, computing Inelastic Mean Free Path(IMFP) which can reflect the sensitivity of the surface and trying to analyze multilayer film. The main research methods are using SEM and EDS for component analysis, dealing with the composition information appropriately and so on.The research result shows that:(1) For the SiO2,Al2O3 film with the thickness of about 100 nm, SEM-EDS composition analysis technology can accurately represent atomic composition of elements. When the thickness of the measured film is less than 100 nm, with the decrease of the thickness SEM-EDS technology can not accurately represent atomic composition. The research shows that when the thickness of the thin film is from 100 nm to several hundred nanometers, SEM-EDS technology fully qualifies for testing work.(2) Based on SEM-EDS technology the measured ingredient information of standard material,combined with some theories and methods, and relied on strong processing ability of computer Inelastic Mean Free Path is available.(3) For the analysis of multilayer film, by using different accelerating voltages of SEM, electron beam goes to different depths, so we get the curve of the element concentration with the change of the acceleration voltage. Then we can determine that which element belongs to which layer.