Cascaded Polymer AWG Integrated Chip Based On Planar Lightwave Circuits

Started with the recent progress and future developing orientation of theWavelength Division Multiplexing (WDM) and the optical integration technology, thesuperiority of the optical integration and the urgency of its integration device’sapplication is stressed. As a research hotspot in the photonics field, ArrayedWaveguide Gratings (AWG) Multiplexer and demultiplexer device plays a veryimportant role in the Dense Wavelength Division Multiplexing (DWDM) system byits versatility (multiplexing and demultiplexing, interleaving, etc.), high performance(high wavelength resolution, multiple channels, low loss, low crosstalk). There aregreat value and promising future in the development and research of the AWG-basedintegrated device in the optical communication system, Code Division MultipleAccess (CDMA) system and the network security system, etc.Based on the non-linear organic-inorganic hybrid cladding material and the SU-8photoresist core material, the cascaded AWG-based integrated device iscomprehensively researched. Combining the advantages of both organic and inorganicmaterials, the organic-inorganic hybrid material exhibits excellent ability in thechemical stability and optical performance. And the SU-8has excellent chemical,thermal stability and optical performance, and also has the relatively simpler processflow. Based on the two materials, the thesis designed, fabricated and tested the AWGdevice and the AWG-based integrated device, of which the central wavelength isaround1550nm. The main research work is as follows.1. Based on hybrid cladding material and SU-8core material, the parameters ofthe polymer AWG device was optimized and the AWG layout was designed accordingto the grating diffraction theory. Finally, a100GHz-channel-space AWG device wasfabricated through semiconductor process flow. The central wavelength is1548.01nm, the space channel is0.793nm, the insertion loss is15~20dB, the crosstalk betweenadjacent channels is lower than-20dB, the transmission loss is1.2dB/cm and thecenter wavelength temperature shift is merely0.08nm/oC. The spectrum indicates thedevice also shows excellent WDM ability.2. Supported by the theory and experiment data, the thesis made an attempt toresearch the cascaded polymer AWG integrated device based on the same materials.First, based on the analysis of the device characteristics, the integrated device layoutwas designed. Finally, a cascaded polymer AWG integrated device was fabricated anda good waveguide Morphology and low transmission loss were achieved throughsemiconductor process flow. The channel space is1.60.1nm, the insertion loss is25~33dB, the crosstalk between adjacent channels is less than-15dB, the transmissionloss is15dB/cm. Through the selective filtering of optical signals, the device achievedthe function of interleaver.