Fabrication And Detection Of Carbon Nanotube Gas Sensor Microelectrodes

With the increasing need for high-performance gas sensor in industrial production, environmental monitoring and so on, the research on gas sensors is becoming more and more important. By outstanding physical and chemical properties of carbon nanotubes (CNTs), it is applied to the gas sensors. A new way will be opened up to improve the performance of the devices.Firstly, it is stated that the simulation process of the electric field intensity distribution of the interdigital microelectrodes (IMEs) with the simulation software to get the proper structural parameters in this paper. The IMEs with the minimum gap about4μm in the ITO surface is achieved by using lithography technology. Electrochemical properties were characterized by cyclic voltammetry and sensitive components are made by multi-walled carbon nanotubes. The gas-sensing property of the sensor is respectively detected under the condition of light and non-light. The optical and electrical properties of carbon nanotubes film are detected in the photoelectric detection system. Moreover, the experiment results are analyzed and deduced. The performance of nano-modified gas sensor under the condition of light is obviously improved.