Research Of The Anti-reflection Coating That Apply To Collective Optics Of Yellow Lasers

To meet the requirements of the dual band anti-reflection coating that apply to collective optics of yellow lasers, that is to say, the coating requires reflectivity between2%～3%at589nm and less than1%at1064nm.This text choose Ta2O5and SiO2as coating materials,designs cycle membrane system and aperiodic membrane system in the base of anti-reflection coating design theory. The text gets optical constants according to the experiment, optimizes membrane system of the aperiodic membrane system by TFC film design software.This text deposits film by electronic beaming vacuum depositing method with the aid of ion assistant deposition systems. We solve the problem of reflectivity is uncontrolled between2%～3%at589nm by optimizing technological parameters included deposition rate, ion source parameters, oxygen filling quantity, temperature of basement and so on. We acquire the antireflection coating which used on the collective optics.This antireflection coating’s reflectivity is2.8%at589nm and0.1%at1064nm.