Research On Master-Slave Telenano-operation System Based On Force Telepresence In SEM

Nano-operation system is an important domain of Nano science and technology, and it is a hot spot of international researches. Nano-operation system is capable of accurate changing or controling devices in atom, molecules and nano-scale. Due to its advantage in efficiency, sensitivity, and adaptability, Nano-operation system has great value in both academic and application.This paper compares the current situation of Nano-system research and disadvantages of the existing Nano-systems. The author also builds a mater-slave teleoperation platform based on Scanning Electron Microscope, Nano-positioning Attocube and Force Feedback Manipulator Omega.3. The new built platform is superior to AFM in imaging velocity, and it is not effected by terminal manipulate probe. Force Feedback Manipulator Omega.3provides flexible operation of Nano Positioning Attocube and force sense perception to operator.Further studies are also made on model establish, collision detection algorithm and force realize of virtual Nano-operation. The collision detection and force models between probe and operation base, operation base and probe, probe and Nano line are established, and the force rendering of virtual Nano-operation is also achieved. The SEM image transmission module based on TCP/IP protocol provide operation in master terminal with visual information. A Telenano operation system software with virtual force feedback is developed with Visual C++2008and rendering engine of CHAI3D. Finally, tests and experiments are conducted on SEM image transmission, virtual Nano operation model, Omega.3—Attocube master-slave manipulate and the real Nano manipulation. The results show that the system developed in this paper is feasible and effective, laying foundation for complicated Nano operation and automatic Nano operation.