Research On Vertical Device Of Micro Force Measurement Using Electrostatic Field

In the international force measurement field, micro scale small force(≤10-5N)measurement hasn’t had a unified method. Because of the rapid development of newmaterials, information technology, nano-technology, biotechnology and other hightechnology, the demand of using and measurement of micro-nano force is more andmore urgent in these fields. Therefore, it is urgent to solve the problem thatestablishing a kind of precision micro force metrology standard system and feasiblemeasurement and tracing device.Based on the measuring principle of micro repetition by using electrostatic field,measuring scheme is analyzed and system design. The source of error and the errorcompensation during the process of micro force repetition are analyzed in detail. Apractical measuring device and series of tests and experiments are completed. Themain research contents and works as follows:1. The application and significance of the micro force measurement in the fieldof modern industry have been discussed, analysis of the development and researchsituation of micro force measurement at home and abroad. The direction and meaningof the research is clear.2. Base on the principle of micro force repetition by using electrostatic field, thevertical device has been system design. It designs the structure and size of theelectrostatic force generating element. Analysis and model research of the sensitiveelement which is used for sense the micro force is also completed. Base on theresearch above, the structure and size of the sensitive element is design.3. Quantitatively analyses of the influence parameters of the capacitance gradientof the capacitors has been done, which is the key parameters of the capacitor sensor.Qualitative analysis of the factors affecting the accuracy of the device in capacitancegradient and micro force measurement has also been done, which provides atheoretical basis for subsequent build of the measurement device.4. Building the mechanical platform device using the flexible hinge sensitiveelement and the supporting device such as the capacitance measuring device, thedetection and adjustment device of coaxial detection on internal and outer electrodes,displacement measuring device, achieving the build of the overall structures. 5. Using the device above, some experiments have been done, which include thecapacitance gradient measurement, the coaxial detection and adjustment of theelectrodes. Finally, using the device we completed the micro force measurement andcalibration. The result proves the vertical micro force measurement device can workcorrectly. According to the experimental results and error analysis, some advices aregiven for the follow-up improvement.