Analysis Piezoelectric Micro-cantilever Modal Analysis And Piezoelectric Effect Based On The Finite Element Method

The micro cantilever is a typical movable micro-structure device,the length andwidth is generally in the micron range,while the thickness of the sub-micronrange.Depending on the application,it can be processed by monocrystalinesilicon,polycrystalline silicon,silicon dioxide,aluminum and other maerials,because thepreparation process is simple,strong scalability of applications,the micro cantileveroccupies an important position in the micro-electro-mechanical systems,in recentyears,according to the piezoelectric effect of the piezoelectric material,micro-cantilever as a sensitive element of the elasticity of the PZT piezoeelectrc thinfilm micro-sensor movement and electrical signal conversion is increasingly becominga hot research.In this paper,we use element simulation software ansys analysis PZT piezoelectricmicro-cantilever.First of all,under the premise of the electrode layer are ignored,we canget the top ten order of the cantilever vibration type and the natural trquency throughmodal analysis of piezoelectric micro-cantilever.Secondly, based on the finite elementmodal analysis model, Analysis the impact of the electrode layer on the dynamicperformance of the different sizes of the piezoelectric micro-cantilever,Then can be confirmed for the piezoelectric microcantilever studied in this paper,youcancompletely ignore the existence of the electrode layer without causing distortion ofthe results;Finally,use the finite element software on piezoelectric micro-cantileverpiezoelectric,study selecting defferent piezoelectric layer material for piezoelectricmicro cantilever sensor sensitivity,The results show that high-voltage coefficient,highcoupling constant of PZT-5H for piezoelectric micro-cantilever piezoelectric highcouping constant of PZT-5H for piezoelectric micro cantilever piezoelectric layer material the sensing sensitivity higher than that of the piezoelectric ceramic.