The Mechatronics Design Of RTP System

RTP (Rapid Thermal Processing) is a method that heats the substrates to the set temperature rapidly and gets them thermally processed in short time, generally less than1～2minites. The implications of RTP are as follows:ion implantation annealing, metal silicide forming, oxidizing reaction.RTP system is charactered with swift temperature increasing or decreasing, and getting the substrates rapid thermally processed. It’s also in advantage at less-time consuming, better temperature uniformity and repeatability and low heat budget.As the working platform and specific environment of semiconductor craft, there are still plenty of works need to be carried out such as operating principle, system structure, working mechanism and theoretical research related to RTP system. The main study of RTP system in my paper is as follows:1. According to the practical needs, the overall design of the RTP system has been implemented. The design was constituted by heating system, electromagnetic drive rotation system, cooling system and gas providing system.2. In the heating system, many works have been done which conclude determining the heating plan and heating lamps, calculating the sum power of RTP system and the number and power of heating lamps, designing the array of lamps as well as the lampshade. In the mean time, the research of the heating lamps radius effect to the thermal stress has also been taken, and the optimized radius of the heating lamps was obtained.3. In the electromagnetic drive rotation system, such works have been done,(1)The effect of key parameters to the torque of rotating system has been confirmed and reasonable value was received.(2) The design of the key part of the rotating system, in other word the coils, has been obtained that contains the size, the winding method, numbers of turns and the electricity.4. In the cooling system and gas providing system, such works have been done,(1) The methods of cooling has been determined. Connected to the overall design of RTP system, the cooling accesses and ports have been provided.(2) The consist of the gas providing system and gas roads have been determined and the diagram of the system has been provided.