Research And Design Of High-power Switching Power Supply For Magnetron Sputtering Coating

With modern human science&technology and quality of life being continually improved, the requirements of customers on the quality and surface of filming products are also increasing year by year. Based on above factors, the filming equipment need possess both excellent stability and very high efficiency.In magnetron sputtering technology, the design of high-frequency switching power supply is an important part of the whole technology. With the rapid development of power electronic technology, today’s switching power supply is developed into high-power and high-frequency switching power supply. This paper designs a set of high-power magnetron sputtering switching power supply according to the requirements of filming equipment.Firstly, this paper introduces current state-of-the-art, tendency and principle of switching power supply; introduces the principle of magnetron sputtering process and application field of sputtering technology. Then, it argues the topology structures of main circuits of all switching power supplies, analyzes their advantages&disadvantages, determines Full Bridge Converter Topology as main circuit form and selects MOSFET as power transistor, through detailed design, determines main parameters of transformer of high-frequency switching power supply and selects magnetic core and high-frequency magnetic line. In design of control circuit, select SG3525PWM pulse controller produced and designed by ST (ST Semiconductor) Company, and feedback circuit, protection circuit and drive circuit are designed. Therein, the design of feedback circuit uses LM324and LM224amplifiers to compare the voltage and current values to control ON-OFF state of power supply, after the compensator is added by modeling, reduce the instability of switching power supply output caused by incorrect operation to improve the reliability of power supply. Then again, for drive power, in view of less resource occupancy, price/performance ratio and less power volume, finally, select American IR2110drive chip and describes design methods of peripheral circuit in detail. Then, it designs auxiliary switching power supplies ensuring normal operation of all chips. It adopts fly back converter topology structure and uses single control chip TOP204of switching power supply as main device. In design of secondary side voltage of transformer, TL431and LM7915chips are added to improve the accuracy and stability of output voltage and ensure stable operation of all drive chips. In order to reduce the loss of the main switching power supply, improve the efficiency of main power supply, the power uses MOSFET Phase-shifted Full-bridge Zero-voltage and Zero-current Soft Switching Technique, by simulating application of Full-bridge Zero-voltage Soft Switch, verify the rationality of design. Finally, it simulates single output waveform and dual output waveform of control chip SG3525and determines the effectiveness of the design.