Development Of Semiconductor Diffusion Process Control And Data Processing System

Aimed at the situation of the control syetem for Semiconductor productionequipment for domestic and international, determine to use the semiconductormanufacturers’ diffusion/oxidation control system as the research object. Accroding tothe characteristic of the past industrial computer control system, PC-based networkmonitoring control system and fieldbus control system, from the practical point of view,designing and developing an affordable, safe, reliable, high-performancediffusion/oxidation system is imperative.The issue mainly researches semiconductor diffusion process control and dataprocessing system. The main data processing software uese Delphi7as developmenttools, and uses MSComm to complete its control to the second control system’dataacquisition and control. The second control system mainly controls the threeclosed-loop control: temperature, gas flow and the push-and-pull boat.The subject deeply works over temperature detection and the development andinstallation of PC management system of diffusion/oxidation process controlmanagement system.⑴According to the actual application requirements of diffusion/oxidation process,the issuse proposes overall design of diffusion/oxidation process control and dataprocessing system based on Delphi7.⑵Self-developed and high-precision temperature sensing module can effectivelyreplace the use of temperature control instrumentation in the control system, with thefeature of low price, good control performance, and good reliability.⑶Development and design of PC data processingsoftware: PC data processingsoftware detects and saves various process parameters, and controls the craft process ina single set of diffusion/oxidation process control system. A PC can be installed multiplesystems, each system runs independently without disturbing each other, and thencomplete the control and mananagement to multiple system.⑷Installation of Upper computer system. The issue separatly developes anddesignes the installation software, the installation software automatically activatesMSComm control register. A PC can install PC data processing system form one to fourset, each host software independently communicates with the corresponding the lowermachine, without effecting each other. On-site operation shows: the design is feasible. System uses the three-one controlways to control the difussion furnace, the control ways is that one PC managementsoftware ands one serial port, and adds one the PLC control software. The controlmethod is feasible in actual operation, which greatly protects the communicationreliability.