Ecr - The Pla's Enhancement And Ecr - Pla In Gas Phase Reaction

In this thesis, spectroscopic methods are used to investigate plasma generated by pulsed laser ablation (PLA plasma), plasma generated by electron cyclotron resonance microwave discharge (ECR plasma), and the process and mechanism of interaction between them.Vacuum, low-pressure nitrogen and ECR nitrogen plasma were used as background ambience; Aluminum, graphite and B4C targets were ablated by pulsed laser for Aluminum PLA plasma, carbon plasma, and carbon/boron plasma respectively.Compared to spectra of PLA plasma recorded in vacuum, those in nitrogen showed lower intensity because of energy consumption caused by collision between particles in PLA plasma and nitrogen ambience. In ECR nitrogen plasma, the collision between PLA plasma and ambience intensified and several interesting phenomena were observed, such as, two-peak feature in time-resolved spectrum of Aluminum atom, and the formation of C2 and CN. The transfer of energy between Aluminum PLA plasma and ECR nitrogen plasma enhanced frequent excitation of particles in PLA plasma and extended the activity of Aluminum plasma.ECR nitrogen plasma was generated as a stable and homogeneous ambience. It changed in temporal and spatial evolution when influenced by the expansion of PLA plasma. The expansion of PLA plasma also enhanced the excitation of N2 and N2+ in ECR nitrogen plasma by tens of times due to different target materials.Since PLA plasma and ECR plasma were both highly activated, the overlapped area of them wasn’t simply combined but integrated complicatedly to form an unique plasma with higher activity named ECR-PLA plasma. In ECR-PLA plasma, the interaction between PLA plasma and ECR plasma was fierce. C2 and CN were formed due to gas-phase reaction in ECR-PLA plasma. The process and analysis will be discussed in details in following chapters.