Research On Key Technology In Three-phase Grating Type Displacement Sensor Based On MEMS

Grating type displacement sensor is widely used in the displacement measurement, topic-based group inventions a new grating type displacement sensor that is named time grating displacement sensor.For several decades studying, the radial time grating gets great breakthrough . Time grating sensor has some marked advantages such as simple structure and manufacture crafts, strong resistance for interference, high intelligence and low cost, which make it have satisfactory market prospect.The thesis is a branch of radial time grating and supported by Chongqing natural science foundation. It solved several key technologies on research. The main research contents as follows :1. Analyzing the operation principles of the grating, inductosyn and time grating sensor and identifying similarities and differences among them, providing theoretical basis for new grating type displacement sensor research.2. Comparing with stator and rotor of inductosyn, proposing reasonable design proposal and designing disc type new structure of new grating type displacement sensor; Designing the coils of stator and rotor by Tanner Pro and processing it by MEMS.3. Researching and fixing on the power frequency of new grating type sensor; Analyzing excitation power and signal processing circuit of time grating sensor, improving them and making them suited for new grating type displacement sensor.4. Designing experiment system of new grating type displacement sensor, developing, calibrating and installing experimental installation for disc type new structure.5. Designing experimental proposal and contrasting experiment with high-precision radial grating, analyzing and dealing with error curve, finishing the rationale experiment of new grating type displacement sensor ; Analyzing the reason of generating error and preparing for improving precision.In a word, based on time grating sensor and inductosyn, the thesis researches new grating type displacement sensor. It discusses in detail from operational principle, structure design, processing technology and signal processing circuit and so on, and solves several key problems for new grating type displacement sensor and finishes the rationale experiment, providing a new research area for time grating sensor.