Manufacturing Technology Of Small Aberration Piezoelectric Deformable Mirror

The reflected wave-front corrector is most widely used in adaptive optics (AO) system, which has high speed response, and can compensate wave-front error in real-time. Among so many types of deformable mirror(DM), the discrete piezoelectric mirror with continuous surface shape has already been used successfully in several AO systems throughout the world just because it has continuous deformable surface shape and can be used in high-power field. That AO technology is applied in holographic optical system is scarcely reported. In this paper, a small aberration piezoelectric deformable mirror is studied in order to correct the abbreations of the holographic recording optical system.In this thesis, the situation of study of DM in AO system is introduced. DM's structure and main properties are introduced also. The concept of using the influence function to express the surface shape of DM is discussed. The influence function is determined by finite element method. The DM is analyzed by using the finite element method with ANSYS software.The total deformation of DM is a synthetic result of all the actuator influence functions. The least squares method is used to correct wave-front aberration in this thesis, the correction capability of DM with 19 actuators or 37 actuators is simulated respectively. The primary aberration can be corrected by DM with 19 actuators. If the number of actuator is increased, correction capability of DM is improved significantly. Finally, we develop the wavefront fitting experiments with a 19-actuator DM fabricated by ourselves. By analyzing the wave-fronts which are detected by an interferometer, the influence function of every actuator, the linear characteristic of influence function and the static stability of DM are obtained. As a desired surface deformation cannot be achieved through supplying voltage on every actuator once a time, an optimization method of DM's deformation is proposed in the thesis, and a given wave-front is optimized in experiment. The rationality of the theoretical analysis is verified by experiment. For relatively simple surface shape, such as the defocus and the astigmatism, the wavefront fitting results of the DW with 19 actuators are satisfied. After optimizing, the PV values of the residual error of surface shape are reduced to 0.0536μm and 0.0682μm respectively.