Using Mems Technology Developed By Silicon Gas Flow Sensors

A gas flow sensor with the structure of double bridge based on MEMS technology is studied in this paper and the work principle of sensor is introduced theoretically. The structure of micro cantilever bridge, the photolithographic mask and the circuit system of the sensor is designed. According to the actual technology condition and equipment, a feasible technology method is provided,and the sensor is developed. The PCB board is produced and the circuit is debugged. The sensor is calibrated in wing tunnel. The repeatability error is reduced by the temperature- voltage integration. The result is: the linearity of the sensor is 0.0023%, and the repeatability error is 0.87% at low wind speed. It is proved the feasibility of the flow sensor with the structure of micro cantilever bridge by using the MEMS technology. The integration and bulk production can be realized with the method that is applied to the field of micro gas flow sensor especially. The sensor has the value of a further application.