Vacuum And Cold Pressure Welding Quartz Crystal Resonator

Quartz-crystal resonator devices have excellent characteristics in frequency control. As the pivotal components for frequency selecting and frequency control, quartz resonators play the most roles in the electronic communication technology. They are widely used in computer, electrical appliance, aerospace navigation, mobile communications, secondary planet, military equipment etc., and now they become the indispensable components in the development of modern electronic information industry.Interiorly, precision quartz resonators all use the glass vacuum-hermetization. But glass hermetically-sealed quartz resonators are bulky and breakable. At the same time, the quartz oscillators are limited to make further improvement on the miniaturization because of the resonator bulk, so it brings some difficulties to advanced application.With the development of modern electronic information industry in our country, and especially with the development of the market demand of communication products and engineering assignment, the requirements are higher than ever. The quartz oscillators' requirements for the resonators are more severe, such as miniaturization, low aging, vibration ability, and survival ability in severe conditions. Traditional resistance welding resonators and glass hermetically-sealed quartz resonators are limited in the application. An urgent need of new type quartz resonator is needed.Vacuum Cold Welded quartz resonators have lower aging rate, higher Q-factors than common resistance welded resonators. Furthermore, they are smaller, more aseismatic than glass hermetically-sealed quartz resonators. And so they will be widely applied in the future.Considering the universality of design and manufacture technique, in accordance with frequency range and overtone,three typical Vacuum Cold Welded AT-Cut quartz resonators (fundamental-mode 30MHz, 3^rd overtone 50MHz, 5^th overtone 120MHz) were fabricated. Based on the basic principle of quartz resonator, this article analyzed the vibration mode, electric characteristics, temperature characteristics, aging law and aseismic characteristics in detail. At the same time, the base technique and principle for the design of resonators and manufacture technology are concluded.This article give a minute description on the principles and parameters of design about resonators in aspects on the quartz material, the wafer dimension, the cut angle, the electrode, the support method and the vacuum packaging, which can be used to produce the general-purpose vacuum cold welded quartz resonators. Simultaneously, detail discussions about the test methods of main performance parameters of quartz resonators and specific ways of experiments are submitted, which can be used to estimate the performance of crystal resonators.As one of the aid projects supported by civil fund of SWIET, this project made a systematic statement on the basic theory of crystal resonators. It made a thorough investigation on the design, manufacture and test results of vacuum cold welded resonators, and has successfully passed acceptance inspection. Up to present, vacuum cold welded resonators have been used in crystal oscillators widely and achieved good results in these applications. That propeled the quartz-control frequency products forward powerfully.Factual proof is that vacuum cold welded quartz resonators possess the performance of low aging, low acceleration sensitivity and excellent electrical characteristics.