Film Bulk Acoustic Wave Resonator Analysis And Design

Recently, the enormous growth in personal communications systems (PCS), satellite communication and various other forms of wireless data communication has made analogue frequency control a key issue with operation frequency increasing to the low/medium GHz range. As the only technology that can be integrated with RFIC and MMIC, FBAR (Film Bulk Acoustic Resonator) is promised to be the best solution among many front-end frequency selection choices, which has much smaller volume, higher working frequency, quality factor, good Out-band Rejection,lower insertion loss and temperature coefficient, compatible with CMOS technology etc.This thesis focuses on the synthesis and characterization of novel thin film materials for electro acoustic applications. The main works are listed below:(1) The basic principle and structure of FBAR, methods of preparation and materials used are systematically discussed.(2) An ideal FBAR input impedance model is induced grounded on the theory of Acoustics, Piezoelectrics, Electromagnetics, and Elastic mechanics.the composite FBAR model is derived from which based on transfer matrix.(3) On the basis of above model, the effect of layer's materials and size property on the performance of FBAR is comprehensively studied, meanwhile, because there are several tens to several hundreds resonant modes in the impedance spectrum, we choose the special one that has the best k2eff, and discussed other parameters under this mode.(4) A MBVD model and parameters distraction methods are proposed, an ADS simulation library is established, which provides convenience for filter topology establishment and design.(5) An synthesis and analysis design methods for FBAR device design is proposed to be a guide in design process. (6) Based on the model and design method mentioned above, a FBAR design software is implemented with mixed programming of Delphi and MATLAB, it can be integrated with ADS to accomplish many design and analyzing work in top-to-bottom and bottom-to-top ways.As restricted by experimental condition and funds, the main task of this dissertation is limited in theory and modeling, simulation and device design, which is the main shortage. The results are still to be verified in pratical fabrication.