Micro Advancing The Ignition Bridge Array Production And Performance

This dissertation main searched the process flow of design and manufacture firing bridged-film and firing array in micro-thruster. The electricity index of bridged-film is tested. The metal chromium is used to be the material of firing bridged-film. The leading wire and welding block is made with the metal copper and al. Utilized the MEMS art, a set of process flow of manufacture firing bridged-film and firing array is designed. The best processing parameter in vacuum coating is confirmed. The relation of coating time, film thickness and square resistance has been checked. The best processing parameter in photoengraving and wet-corrosion is found.The various electricity index of chromium bridged-film is tested. The electric-thermo conversion is exploded. When the film thickness is about 7646A, we get a max firing power and min delay time. When the inlet constant current is 0.3A, the firing delay time get a maxim value. The lowest firing constant voltage is 13V, in which lead styphnate can be ignited.Use the micro-process technology, a three layers micro-thruster firing arrays was designed. It could integrate 4×6 array on the prototype with 9mm×9mm.The mathematical model about electric-thermo conversion and thermo transmittance of bridged-film resistance is built.