Research Of Piezoelectric Biosensor Based On Nano-Crystalline PZT/Quarts

The piezoelectric ceramics PZT has high piezoelectric coefficient, and the quartz has good frequency stability, dynamic response and good antijamming ability, if the advantages can be combined, the resonant frequency and sensitivity of the traditional piezoelectric biosensor using quartz as the sensing unit can be improved, so the piezoelectric biosensor based on nanocrystalline PZT/quartz is researched in this article.To optimize the preparation technologies, it was examined that the influence of different process flow during a sol-gel processing on the size distribution of PZT sols. It is found that the value of major peak of size distribution of sols can remain the nanometer dimension for a long time after the sol-gel method improved was adopted.The influence of different substrate to crystallization of PZT films is researched. The experiment shows bad crystallizing ability when the noncrystalline SiO2 as the substrate, but it reachs nanometer scale when quartz as the substrate. The XRD and AFM results reveal that the PZT films feature (110) preferred orientation, good automorphic crystal structure, smooth surface.The influence of different crystallization treatment to crystallizatio n of PZT films is also researched. crystalline grains are obtained by both conventional heat treatment and rapid thermal annealing. The nanometer scale reachs several decades, but the PZT films through RTA have smaller grains and compact structure.The influence of different annealing temperature, thickness of PZT flims to PZT solution characteristic frequency is developed, too, at last, cell detecting is tested, and high sensitivity of sensing unit is obtained.