Application Research Of Fine Cleaning Technology In Manufacturing Of TFT-LCD

The TFT-LCD (Thin Film Transistor-Liquid Crystal Display) industry has been rapidly developing since 2000 with the more and more severe horizontal competition. And the product yield is becoming more and more important for the TFT-LCD suppliers. In the manufacturing process the particle and some kinds of contaminations are the main cause of the product fault. So how to effectively control the amount of contaminations is an important and difficult task for all the suppliers. With the backdrop of the industry production, the paper introduced and analyzed some kinds of fine cleaning technology, and got conclusions that was useful to how to get the best cleaning effects.Firstly, the manufacturing process, importance of cleaning technology ,main kinds of contaminations and the failures caused by contaminations were introduced.Secondly, the paper detailedly analyzed the principle of some cleaning technology, cleaning objects and application attentions. At the same the dry-cooling technology and methods evaluating cleaning effects were introduced.Finally,in order to get the best cleaning effects, a mass of tests was done. In the tests which involves process of"data collection-data analysis-test again-again data collection-again data analysis"……we got conclusions as follows:①Getting best process parameters of UV Cleaning, brush cleaning, high pressure jet cleaning(including CJ cleaning) and US cleaning; Getting the ways of how to search best process parameters;②Getting the best cleaning measures of all size of particles: brush cleaning+high pressure jet cleaning+US cleaning;③Getting the best cleaning measures of organic impurities: brush cleaning+chemic liquid+high pressure jet cleaning+UV cleaning;④Getting the best cleaning measures of metallic contamination: high pressure jet cleaning(using clean water).Using the results of tests the yield of cleaning process was changed from 92.7% to 98.4% in the first 4 months when production line has begun working. The paper conclusions have values for TFT-LCD manufacturer in searching for best cleaning process.