Investigation Of Some Technologies In Implantable Micro Devices

With the rapid development of MEMS technology during the past 20 years, many micro devices have been developed and used in the biomedical engineering. The implantable device is a cutting-edge topic which is a MEMS technology application used in the medical field. Several technical issues of the implantable device were studied in this paper which mainly includes three parts:Part I: Study of an implantable micro RF MEMS inductive coilFirst, the inductance model on the silicon substrate and factors which impact the quality factor of the inductive coil were analyzed. Based on that, the micro RF MEMS inductive coil on the glass substrate was studied. The HFSS software was used to optimize the design of the coil and determine the production process. The microfabrication and test of the device were completed.Part II: Study of the packaging technology for implantable microdevices Based on the analysis of the requirement and performance of the implantable device, the packaging technology was studied. Two packaging methods were developed by using the implantable micro RF MEMS inductive coil as the sample. The first method used metal to package and the second one used the Si_xN_y-SiO₂-Si_xN_y dielectric thin film and organic silicone simultaneously. And then the two packaged devices were tested by being put into the saline which was similar to the human body environment. The result shows that the device which was packaged by Si_xN_y-SiO₂-Si_xN_y dielectric thin films and organic silicone has better performance and longer working hours in implanted environment.Part III: Preliminary study of the signal emitting system for implantable microdevicesThe circuits of the implantable signal emitting and receiving system were analyzed based on the working requirement analysis. And then an implantable pulse oscillator chip was studied. The result shows that the pulse oscillator implantable chip can meet the requirement of the implantable signal emitting system.