Study On Fabricate Process And Quality Testing System Of Micro-bolometer

Thanks to MEMS, uncooled micro-bolometer array system received fast development. Compared to traditional cooled infrared bolometer, uncooled bolometer has great advantages in portable, manufacture and maintenance cost. Our laboratory has engaged in study on theory, preparation and performances of VOX and PS, and has ability in repeating preparation of good performances materials based on abundance experiences, for searching for succeed applications of materials on micro-bolometer, we have to deal with issue of it compatible with other whole process flow.Study on designing of sensor device's structures and whole reasonable fabrication process, which are two key issues of uncooled infrared bolometer that based on MEMS technique. Establish testing system for quality of micro-bolometer.In studying of device structure, figure out feasibility and practicability of monolayer better than double deck structure, simulate mechanical and calorifics performances of existing micro-bridge structure, and summarize their unique merits, deep study on devices Thermal Conductance influence on Thermal Constant. In studying of process flow, experiment on Si3N4 film anti-erode ability to HF, for solving stress between structure's films, innovate advance"sandwich"structure of SiO2-Si3N4-SiO2, which guarantee uniformity of micro-bridge surface. Study on testing system for quality of micro-bolometer, study out a disabled classify system based on circuit, sensor and function model, combine with big dimension fab process conditions and associate with issue that come out from design and fabricate of micro-bolometer, figure out potential issue for manufacturing of bolometer. Point out merit of using inert gases for encapsulation, avoid drawback of high cost from vacuum encapsulation.Along with lucubrate, micro-bolometer's development will become faster and faster, and we can forecast its industrialization will come true soon.