Research Of The Stability Of MEMS Optical Switch

The new micro mechanical optical switch which take MEMS as the foundation has the characteristics of slightly volume, easy to integrate,and to the wave length, the refractive index, the temperature and so on the physical parameter insensitive, becomes mainstream direction which the large capacity exchange light network switch develops. But the related design theoretics and tools cannot satisfy the devising demands yet. So the method of trial and error, which resulted in low eligible products ratio and low reliability, is the primary technology reason which slows down the step of research and industrialization of the products.The article in view of electrostatic comb-drive MEMS optiacal switch, on the basis of the parallel-platec apacitance theory and the virtual displacement principle, has derived the model for calculating electrostatic force (or moment of force) of Static electricity comb. The phenomenon of pull-in or snap-down is analyzed, which results from the coupling between the elastic force of microstructure and the electrostatic force, calculated the pull-in deflection of microbeam driven by electrostatic force, analyzed the efect of air-film damp on the response speed of micromirror. Designed the big damping electrostatic comb-drive MEMS optical switch, and established the system simulation model of the optical switch.Proposed the method of joins the feeds back electric capacity in optical switch system, enable the non-linearity of electrostatic force to be improved, reduced acceleration change of the micro mirror in the motion process, thus enhanced the stability of optical switch, and broke through the limit of the phenomenon of pull-in or snap-down, increased the motion distance of the micro mirror under the premise of did not change the optical switch compact.