Fabrication Of 2D Photonic Crystal Templates By Holographic Lithography And Soft Lithography

As a new-style artificial material, photonic crystals will facilitate the development and innovation of the photonics and information industry. The tremendous application foreground of photonic crystals upsurges the research in fabricating periodic artificial structures in many famous labs all over the world during the last decade, which has been a very important research direction in the field of photonics.The main research is the fabrication of two dimensional (2D) holographic crystal templates with different periods by holographic lithography. The character of holographic lithography is to use N laser beams to form interference patterns, the max. of intensity distributed periodically, forming crystal lattice, which is used to be recorded in the photosensitized material, so that photonic crystal template is formed.The following are the main assignments finished.No.1: This paper reviews the recent development of the study on the micro-fabrication technique by holographic lithography combined with photo-polymerization and the development of soft lithography. The characters of the laser sources, photosensitized polymers and PDMS are introduced in the paper.No.2: According to the holographic theory, we calculate some important optical parameters to form grating and 2D triangular lattice textures, especially analyze the polarization and intensity threshold, which affect the interference patterns. We simulate the optimized patterns by choosing the polarization and intensity threshold.No.3: Design and complete the optical system to create 2D holographic crystal templates. No.4: Use holographic lithography to create grating and 2D holographic crystal templates, record and process the data. Analyze the factors which affect the quality of the holographic crystal templates. No.5 Reverse the periodic structure in PDMS by soft lithography .By processing properly the PDMS, we can reduce the period of the structures sequentially.No.6 Change the hologram, and fabricate 2D holed photonic crystal templates in Epon-SU8. Finally, I conclude the paper and prospect the future of this field.