Design And Fabrication Of Micro-ring Resonator On Glass

High density planar optical integration which is compatible with the IC technology is one of the most important parts for optical waveguide technology today. For their functionality, compactness and selectivity of wavelength, micro-rings have become one of the potential modules of the VLSI-PC. With the development of planar technology, optical micro-rings are investigated more and more by researchers and developing rapidly. Micro-rings in photo-electronic field are just like transistors in electronic field. The passive rings on glass with big radius fabricated by ion exchange can be used as inertial sensors, wavelength sensors, temperature sensors, sound-wave sensors, optical gyroscope and so on. They play important roles in the optic-electronic field.The application background and developing process of micro-ring resonators are introduced in the paper. The key of study are design and fabrication of micro-ring resonators on glass. According to couple mode theory (CMT), the principle of the ring resonator is analyzed. Simulated with BeamProp, the parameters of devices are optimized. We fabricated micro-ring resonators with ion-exchange technology on different kinds of glass (including BK7 B270 K9 and so on) and different parameters are used. We test all the samples and a majority of samples show obvious resonance character as filters, such as rings, racetracks with radius as 500um and rings with radius as 3000um and 3500um.In conclusion, we investigated all parts of the micro-ring resonators on glass, from theory to design, and from the fabrication to the test. And good results are achieved.