Structure Optimization Of Four-Dimensional Piezoelectric Force Sensor And Research On Calibrating Method Of Multi-Dimensional Piezoelectric Force Sensor

With the rapid development of technology, the multi-dimensional force sensor is not only used in the traditional field of robotics, but also applied to other fields, such as modern medicine(auxiliary medical operation), sport competition, aviation and spaceflight(wind tunnel test, installation testing of rocket engine), manufacturing industry(auto grinding), automotive. According to the characteristic of the quartz with different cutting-type, a new"two-layer""wafer group"four-dimensional force sensor was designed.The main work of this thesis:①Based on the situation of the multi-dimensional force sensor, researched a new structure of four-dimensional force sensor. Quartz has been chosen as the sensing element, the layout of the existing structure of four-dimensional piezoelectric force sensor was optimized, and a new"two-layer""wafer group"structure was designed.②By using FEA, getting several parameters, such as sensitivity, coupling interference, sensitivity, force electric conversion efficiency. These parameters has proved the rationality and availability.③Based the situation of calibrating device of multi-dimensional force sensor, researched the static and modal calibrating parameters and calibrating methods about the multi-dimensional force sensor, analyzed several typical kinds of static and modal calibrating methods, and did a verification experiment for pull-pushing measurement static calibrating method.The study has a great reference value for new designing of four-dimensional piezoelectric force sensor.