The Characteristics Of Mercury Micro Capacitive Accelerometer And Testing Research

The rapid development of MEMS technology accelerates and integrated circuit theresearch and application of the micro inertial sensor. At present, the micro inertial sensor ispresenting the trend of commercialization and industrialization in every field. The microinertial sensor has many advantages in bulk,integration,cost,power, consumption,reliabilityetc. but, the flexible structure of the micro inertial sensors were powered by solid-statestructure in many countries at present , there is a contradiction between high sensitivity andhigh overload. It confines the application range of micro inertial sensor to a great extent. Sothis dissertation considers a micro capacitive mercury accelerometer, and MS3110, a kind ofmicro capacitance measurement chip made of Micro Sensor corporation of USA,as the studyobject,and Uses the special algorithm,for example Kalman Filtering,to filter the noiseadulterating in acceleration signal measured by MS3110 and estimate the accurateacceleration Main research subjects are included as follow:1. Introducing the elements and common characteristic of MS3110. expatiating on the circuitdesign of application and the calibration of MS3110. Introducing the experiment system of thesubject. Analyzing and studying the static and dynamic characteristic of MS3110 deeply.2. Introducing the circuit detection and data acquisition program of the micro mercurycapacitive accelerometer, Accurate testing and analyzing the experiments of the single anddifferential capacitance to the acceleration sensor; finally, researching and testing the microcapacitive mercury accelerometer.3. Introducing a method of establishing the state-space model of micro accelerometer. Basingon it,expatiating on the algorithms of standard Kalman Filtering,and on the application.At last, analyzing the results of experiments.