Research On Heat Transfer And Experiment For Microimprint Of Polymeric Microfluidic Chip

Microfluidic chip systems have recently entered the forefront of instrumentation development in analytical sciences, MEMS, life sciences, chemosynthesis,analytical instruments and environment sciences and become the main direction. Additionally, the development of microfluidic chip analytical systems is based on the advanced micromachining technology.Research on heat transfer and experiment for microimprint of polymeric microfluidic chip is a key component of national 863 project named the micro-mould fabrication equipment of microfluidic chip (item muber:2002AA42115). Main purpose of this dissertation is to establish and solve heat transfer of the microimprint process and simulate temperature filed for hot imprint of polymeric microfluidic chip by finite element ANSYS. Finally, we obtain optimization temperature for microimprint.Chapter 1 is the introduction of this dissertation. An overview is given about the significance of microfluidic chips and the normal fabrication methods of microfluidic chips were introduced, such as hot imprint, photolithography , LIGA and so on. Finally, a survey of the domestic and abroad microimprint was introduced.Chapter 2 introduces the elementary principle of microimprint technology, which is the normal manufacture technology of micro-fluidic chips. A lot of advantages of polymer in contrast to the substrates silicon, glass, and quartz were introduced in detail.Chapter 3 introduces heat conduction of multilayered films and discusses some of solution for equation of heat conduction, which is the base of establishing and solving model of heat transfer.Chapter 4 starts with elementary principle of heat conduction, and establishes the model of heat up. Integral transform is used to solve the model. Finally, the equation of temperature is obtained.Chapter 5 introduces finite element and the software ANSYS to solve the microimprint problem of heat conduction and the temperature fields are developed.Chapter 6 introduces configuration of microimprint equipment, which is researched and manufactured by ourselves. Then, we make a lot of microimprint experiment by PMMA...