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Optimal Design And Realization Of Cusp Magnetic Field Of Mono-Crystal Furnace

Posted on:2006-03-19Degree:MasterType:Thesis
Country:ChinaCandidate:T AnFull Text:PDF
GTID:2168360152475507Subject:Microelectronics and Solid State Electronics
Abstract/Summary:PDF Full Text Request
Firstly, the paper acquires the parameters of cusp magnetic field of Czochralki method (CZ) which based on impurity segregation and convection of melted and restraining analysis about magnetic field influencing convection of silicon melt. Then a math expression with regards to equivalent acceleration of gravity, geff and magnetic intensity B is calculated in this paper, and equivalent acceleration of gravity of silicon melt is calculated and analyzed for three characteristic measure of crucible.Secondly, the key parameters, magnetic field distribution, the heft of magnetic filed on the liquid surface of the wall of crucible, Br the power of coil and so on, are analyzed and simulated by using ANSYS software. The paper acquires the relation of Br varying with coil turns, Distance between the two coils, coil current and the relation of coil power varying with coil turns and lead area. Then the parameters of cusp magnetic field of eight-inch CZ mono-crystal furnace are optimally designed.Finally, the parameters of stimulated design of cusp magnetic field of eight-inch CZ mono-crystal furnace are validated by experiments. The validating results show that stimulating results are correct, actual and completely reliable. The stimulating method can be used into actual design, and it is a new design method of magnetic field.
Keywords/Search Tags:Magnetic field intensity, convection, cusp magnetic field, mono- crystal furnace, Finite element
PDF Full Text Request
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