Study Of Light Scattering Calculation By Single Sphere On Silicon Wafer

Based on the extended boundary condition method and addition theorem of vectorspherical functions, mathematical and physical model is found by focused on thespherical particle on silicon surface. Light scattering character of spherical particle onsilicon surface can be obtained through solving the model with mathematics andcomputer tools. So it will be powerful theory for engineer to design delicacy andeffective diagnostic tools. It is the model for light scattering of spherical particle onsilicon surface: the incident plane wave strikes the sphere not only directly but also afterinteracting with the surface. In addition to the above two fields, a third field exists in theambient medium. The field is a result of the scattered field reflecting off the surface andstriking the particle. In the extended boundary condition method the scattered fieldcoefficients are related to the expansion coefficients of the fields striking the particle bythe transition matrix. So a method of solving light scattering of spherical particle onsilicon surface can be obtained. At last, initial simulation results are given according tothe model.