The Research Of Chip To Measure Biology

Biologic project chip combining microelectronics and biologic technique tightly would be a new hot spot in microelectronic field in 21 century, which had a representation-DNA chip.This paper discussed a semiconductor chip used to analyze DNA liquor in flow injection analysis. The chip was produced by semiconductor IC technique, which include a array of photoelectric measuring utensil with seven photoelectric dynatron, a resistance heater and two diodes measuring temperature.In the designing photoelectric cell, the area absorbing light was as far as big, and the down lead electrode was as far as small; For technique, the BC junction should be shallow junction diffusion to enhance the sensitivity to light. The heating resistance was designed to use high concentration B diffusion to heat the liquor above 70℃, the diode was produced by short BC dynatron structure.The compound interferential light filter membrane with about 50 layers SiO2-TiO2 was deposited on the surface of the chip. The membrane was etched with plasma, times of gelatinize and times of etch. In protect the silicon layer, the technique of facturing Al electrode before deposited membrane was used. These were the characteristics of studying this work. The testing result of chip was listed and the parameter of the chip was accorded with the design demand. Now it was used in the fact.At last, some advices were given for the problems mention when studying more.