The Research Of Mark Signal Detection And Alignment Technology Used In High-energy Projection Electron Beam Lithography System With Demagnification Imaging (PELDI)

The research of mark signal detection and alignment technology is introduced, which is used in high-energy Projection Electron Beam Lithography System With Demagnification Imaging (PELDI), including relative system design, process design, and algorithm design. The experiment data are given, and 45nm for 3 o is achieved as the result.Constitution and theory of alignment system used in PELDI are introduced in the theoretic experiment on the alignment technology. The application of digital process technology in the alignment is also described. The data of alignment and software processing are discussed, and the results of practical tests are given. As the result, the feasibility of using digital signal process to deal with BSE signals is validated.The software of alignment simulation for PELDI is designed. The mathematical model and the arithmetic of the software are described. Two sorts of BSE signals are simulated as examples. The mask image and the relative mark image are designed according to the characteristic of the BSE signals from different mark images.At the end of the research, the expectant alignment precision is achieved, with the use of new detection devices and the increased signal-to-nose ratio. The new mask and mark images are also designed specially for PELDI.