| The structure and basic theory of the electrical control system of the precision workbench. It is applied in quasi-molecular laser photolithographic technology. Optical grating bit shift detection control system, and digital closed-loop servosystem, which controlled by the computer, can communicate mutually, exchange data and transmit control information. Overall system can achieve the high accuracy position. Each part also can run and implement discrete work. The communication of the master computer and subordinative computer adopts RS232 serial interface, which adapt the long distance communication. It is designed dimply and low power dissipation. The paper discusses the application of CPLD components to predigest the circuit design. The master computer system software is programmed by LabVIEW which has graphic programming environment, and controls system through the interactive graphic front panel and displays the result.
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