Researches On Absolute Measurements Based On White-light Interferometer

With industrial development, the measurement accuracy of the product is to be further improved, the absolute distance measurement device needs to be improved in recent years.For this reason, this subjects researches the device based on white light interference to measure the absolute distance. This paper has a deep research on the principle and characteristics of white-light spectral domain interference from the theoretical study and practical point, and analyses a way for distance spectrum test based on white light interferometer. This paper mainly researches white light interference measurement systems, which uses the white-light Michelson interferometer to compose the interference system, and uses fiber optic spectrometer USB2000 to receive spectral interference signals related with absolute distance.This paper describes detailedly the measuring principle of the system, the measuring devices, the data processing and the experimental verification. The final output signal only has relation with the arm length difference of the interferometer, while has nothing to do with the phase measurement in its optical path, therefore, it effectively increases the system's measurement range. At the same time, the use of the principle of white light interference improves measurement range and anti-jamming ability. This paper researches the basic data processing techniques of the spectrum of white light interference.This paper discusses the absolute distance measurement method based on the white-light interferometer using the spectral analysis, and uses the spectral characteristics of interference when optical path difference is greater than the coherence length to increase the dynamic range of white light interferometer measurement. Using the basic data processing method of spectrum of white light interference,it resolves the core issues of the absolute distance measurement techniques that affect the accuracy, and allows the system to achieve a high accuracy. This paper has the detailed study of the composition of equipment components, system calibration, test results, performance indicators and some influencing factors. This test system has a high measurement resolution, and its measurement range is about 1~50 microns, and the single measurement time is less than 50ms; The measurement structure has the advantages in the compactness, non-contact, non-destructive , rapid detection, high accuracy,safe and reliable.