Research On Error Separation Methods Of Nano Coordinate Measuring Machines

Coordinate Measuring Machines (CMM) is a kind of modern high efficiency precision measuring equipment. It is widely applied to machinery manufacturing, electronics industry, automobile industry and aviation and aerospace industry, etc. With the rapid development of nano-micro engineering technology, nanometer order accuracy and micromation have become a new trend in developing CMM home and abroad in recent years. In this paper, the new Nano-CMM, which is being developed, is the object of the study. The modern accuracy ensuring theory and technology are researched and adopted, such as nanometer order level analysis of total error source and uncertainty calculator, nanometer order accuracy system accuracy design, high accuracy error separation methods research and error correction software programming, and system accuracy calibration, to realize the development of Nano-CMM with low cost but high accuracy.This paper mainly introduces the study on high accuracy error separation methods. Based on error separation techniques, the miniature three-beam laser interferometer with nanometer order accuracy SP 2000 of the SIOS Corporation of Germany is utilized to research on the error separation methods of the being-developed new type Nano-CMM. The SP 2000 can measure length and angle values synchronously. It measures every single error of CMM by adopting the error separation methods designed by the author. Based on the insert value arithmetic of cubic spline function, the graphical program software LabVIEW 8 of the National Instruments Corporation is used as software platform to program error data obtained from experiments and fit one dimension curve and two dimension curve face. CMM is treated as rigid body model and the method of dynamics modeling is adopted to correct the error.