Research On Statics And Dynamics Of Electrostatic Comb-Drive In Micromachine

This thesis summarizes the contents, properties, applications and developments in the world on MEMS. The driving mode, the advantage and disadvantage upon micro-actuator, the traits, applications and the principle of electrostatic comb-drive are introduced. Making a typical electrostatic comb-drive in micro-resonance equipment as the research object, we analyze the electrostatic force of this structure and its displacement. On the basis, the thesis describes two equivalent models, one is the bending vibration model of homogeneity spring presented by some researchers, the other is the bending vibration model of cantilever beam, which equivalents the structure as a collecting mass block on its free end. This model is put forward in the thesis. On the basis of the cantilever beam model, we get a vibrant equation without damp and with damp by the method of vibrancy theory, also the inherence frequency equation and the parse expression of the mode function are derived, at last achieve the dynamic response of the structure without damp and with damp. By modeling and analysis using finite analysis software, the thesis gains the vibrant mode of the structure. Then we compare the results. At last, based on the analysis theory and method of size effect of the MEMS, we made some size effect analyses systematically to the electrostatic comb-drive structure, which will provide a theoretic foundation for the design of electrostatic comb structure in MEMS.